Company Name:*
Address:
Project Coordinator:*
City:
Phone:*
State/Province:
Fax Number:
Postal Code:
Contact E-Mail:*
Country:
Additional
Personnel:
Date Proposal Required:
Desired Project
Completion Date:
Project Name:
GENERAL FACILITY DESIGN CRITERIA
Process to be performed in the
cleanroom:
Cleanliness
Class
(Check one)
Class 10
ISO 4
Class 100
ISO 5
 Class 1,000
ISO 6
 Class 10,000
ISO 7
 Class 100,000
ISO 8
 Not Sure
Comments:
Desired Room Conditions:
%
 +/-
°F
 °C
Temperature setpoint::
+/-
Relative Humidity setpoint:
%
Comments:
Type of Equipment to be used in the
cleanroom:
Process Heat Load:
The heat load generated by process equipment and dissipated to the room (KW or BTU/hr) can be
estimated based on the total power consupmption of the process equipment.
Any open tanks or other source of high moisture load to the room
People Load:
Average number of people
working in the rooms:
Expected operating shifts per day:
Process exhaust affects the type and size of the HVAC equipment requied for the room.  In addition,
fume exhaust may require apecial treatment to comply with air pollution codes.  Pleane specify the
type and quntity of any hazardous or toxic liquids or gasses used in the room.
Hazardous Materials:
Static Control:
Yes
 No
 Conductive Flooring
Required?
 Yes
No
Process or materials are ESD
sensitive?
Special Considerations:
Special lighting,
pressure relationships, air flows, etc.
CLEANROOM DESIGN DETAILS
Desired Room Size:
(Or attach plan)
Ceiling Height:
Ceiling Height:
Ceiling Height:
Material Passthru Size:
Interlocked:
Yes
 No
Interlocked Doors:
Automatic Doors:
 Yes
 No
Yes
 No
Air Shower:
 Air Ionization:
No
Yes
Yes
 No
Utilities:
120V convenience outlets spaced every
 feet along walls.
Other electrical outlets:
Intercom System:
Compressed Air, Nitrogen, Argon,
Vacuum, DI Water. etc.
Central Vacuum Cleaning System:
Room Monitoring
Instrumentations:
Full building automation system with PC graphics control and trending
Room static pressure gages
 Digital Temp/Humidity Displays
PC interface for temperature, humidity, static pressure downloads
Comments:
SITE INFORMATION
Building Data:
Existing Building:
 New Construction:
floor of a
story building.
Cleanroom to be installed on the
Clear height from floor to bottom
of joists?
Demolition required to make way
for cleanroom?
No
Yes
Approximate
height of building roof?
Does the building have fire
sprinklers?
Yes
 No
Height of interferences
remaining below joists?
Air-Conditioned around cleanroom
area?
 No
Yes
Distance of cleanroom from
outside building wall?